Optical
micro-electromechanical
device (OMED)
OMED is
used for
characterization
of
mechanical
properties
(Young’s
modulus,
yield
stress)
under
tension of
elements
of
micro-electromechanical
systems (MEMS).
It can be
employed
to test
polymer,
semiconductor,
metallic
etc, thin
films and
multilayer
structures.
The
principle
of
operation
Specimens
are
deformed
by PZTech
ApS
ceramic
multilayer
actuator.
Tensile
force is
measured
by
SENSOTEC
subminiature
load cell
. The
displacement
of testing
specimen
points is
mesured by
electronic
speckle
pattern
interferometer.
The device
is
computer
controled
using the
original
software
created on
the basis
of LabVIEW
Characteristics
Linear
dimensions
- 25x17x30
cm
Maximum
available
displacement
- 70 µm
Maximum
tensile
rate - 150
nm/s
Displacement
resolution
- 50 nm
Maximum
measured
force -
2,5 N
Force
resolution
- 0,01 N
Area of
optical
analysis -
0,25 ÷ 6
mm2
Our
partners
in the
project
 KAUNO TECHNOLOGIJOS UNIVERSITETAS
 UNIVERSITÉ DE POITIERS
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